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Journal of Crystal Growth

Volumn 267, Issue 1-2, 2004, Pages 8-16

Thermodynamic modeling of AlGaInN growth by MOVPE

(3) Leitner, Jindřich a Stejskal, Josef a Voňka, Petr a

a INSTITUTE OF CHEMICAL TECHNOLOGY (Czech Republic)

Author keywords

A1. Deposition diagrams; A1. Thermodynamic analysis; A3. Metalorganic vapor phase epitaxy; B1. Nitrides

Indexed keywords

ALUMINUM NITRIDE; CHEMICAL BEAM EPITAXY; COMPOSITION; DEPOSITION; GIBBS FREE ENERGY; METALLORGANIC VAPOR PHASE EPITAXY; PARAMETER ESTIMATION; THERMAL EFFECTS; THERMODYNAMICS;

DEPOSITION DIAGRAMS; THERMODYNAMIC ANALYSIS; THERMODYNAMIC CALCULATIONS;

CRYSTAL GROWTH;

EID: 2942513462 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2004.03.027 Document Type: Article

Times cited : (3)

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