Thermodynamic analysis of the MOVPE growth of InGaAlN quaternary alloy

Journal of Crystal Growth

Volumn 221, Issue 1-4, 2000, Pages 743-750

  Koukitu, Akinori ^a   Kumagai, Yoshinao ^a   Seki, Hisashi ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; METALLORGANIC VAPOR PHASE EPITAXY; PHASE DIAGRAMS; SEMICONDUCTOR GROWTH; THERMODYNAMIC STABILITY; VAPOR DEPOSITION;

INDIUM GALLIUM ALUMINUM NITRIDE;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0034505546     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00810-1     Document Type: Article

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