MOCVD technology for semiconductors

Materials Letters

Volumn 30, Issue 4, 1997, Pages 255-263

  Thompson, Alan G ^a  

^a EMCORE CORPORATION   (United States)

Author keywords

MOCVD; Semiconductors

Indexed keywords

ACCIDENT PREVENTION; CHEMICAL REACTORS; COSTS; EPITAXIAL GROWTH; HYDRIDES; MANUFACTURE; ORGANOMETALLICS; SEMICONDUCTOR MATERIALS;

CARRIER GASES; DOPANT; GROWTH MECHANISM; HETEROEPITAXY;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 0031101822     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(96)00215-7     Document Type: Article

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