Quasi-thermodynamic model of MOVPE of InAlN

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 21, Issue 8, 2000, Pages 729-734

  Lu, Dacheng ^a   Duan, Shukun ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; METALLORGANIC VAPOR PHASE EPITAXY; MODELS; THERMODYNAMICS;

PHASE SEPARATION; THERMODYNAMIC MODEL;

INDIUM ALLOYS;

EID: 0034240340     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)