Thermodynamic analysis of the MOVPE growth of InAlN

Physica Status Solidi (A) Applied Research

Volumn 180, Issue 1, 2000, Pages 115-120

  Koukitu, A ^a   Kumagai, Y ^a   Seki, H ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; HYDROGEN; METALLORGANIC VAPOR PHASE EPITAXY; NUMERICAL ANALYSIS; PARTIAL PRESSURE; PHASE DIAGRAMS; PHASE INTERFACES; SEMICONDUCTOR GROWTH; THERMAL EFFECTS; THERMODYNAMIC PROPERTIES;

THERMODYNAMIC ANALYSIS; VAPOR SOLID DISTRIBUTION RELATIONSHIP;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0034224243     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200007)180:1<115::AID-PSSA115>3.0.CO;2-A     Document Type: Article

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