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Journal of Crystal Growth

Volumn 208, Issue 1, 2000, Pages 73-78

Quasi-thermodynamic analysis of MOVPE of AlGaN

(2) Lu, Da Cheng a Duan, Shukun a

a INSTITUTE OF SEMICONDUCTORS (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; HYDROGEN; METALLORGANIC VAPOR PHASE EPITAXY; NITRIDES; PRESSURE EFFECTS; SEMICONDUCTOR GROWTH; THERMAL EFFECTS; THERMODYNAMICS;

ALUMINUM GALLIUM NITRIDE;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0033888516 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(99)00458-3 Document Type: Article

Times cited : (13)

References (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.