CW laser-induced fluorescence study of SiH2+SiH4 reaction: dominance of two-body reaction channel in low-pressure silane plasma

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 7 B, 1999, Pages 4389-4392

  Kono, Akihiro ^a   Hirose, Satoshi ^a   Goto, Toshio ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; DENSITY (SPECIFIC GRAVITY); DYE LASERS; FLUORESCENCE; HYDROGEN; MOLECULES; PLASMAS; PRESSURE EFFECTS; RATE CONSTANTS; SPECTROSCOPY;

AFTERGLOW; LASER INDUCED FLUORESCENCE SPECTROSCOPY; LOW PRESSURE SILANE PLASMA; MONOSILANE; SILYLENE; THREE BODY ASSOCIATION PROCESS; TWO BODY REACTION CHANNEL;

SILANES;

EID: 0033157821     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.4389     Document Type: Article

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