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Diamond and Related Materials

Volumn 14, Issue 11-12, 2005, Pages 1815-1819

Effects of acetylene addition on mechanical and dielectric properties of amorphous carbon films

(2) Louh, S P a Hon, M H a,b

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

b DA YEH UNIVERSITY (Taiwan)

Author keywords

Acetylene; Low dielectric constant; Plasma processing and deposition

Indexed keywords

ADHESION; CARBON; HARDNESS; PERMITTIVITY; STRENGTH OF MATERIALS;

ADHESION STRENGTH; AROMATIC RINGS; NANAOINDENTORS;

AMORPHOUS MATERIALS;

EID: 27744588881 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2005.08.001 Document Type: Conference Paper

Times cited : (5)

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