SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 95, Issue 7, 2004, Pages 3704-3710

Nanoscratch evaluation of adhesion and cohesion in SiC/low-k/Si stacked layers

(6) Ye, J a Kojima, N a Ueoka, K a Shimanuki, J a Nasuno, T b Ogawa, S b

a NISSAN ARC LTD (Japan)

b SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; CHEMICAL MECHANICAL POLISHING; FRACTURE TOUGHNESS; FRICTION; HARDNESS; INTERFACES (MATERIALS); MICROSTRUCTURE; MULTILAYERS; PERMITTIVITY; TRANSMISSION ELECTRON MICROSCOPY;

COHESIVE STRENGTH; NANOSCRATCHING METHOD;

SILICON CARBIDE;

EID: 1942542412 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1664025 Document Type: Article

Times cited : (25)

References (14)

1
- 0029547914
- M. Bohr, Tech. Dig. - Int. Electron Devices Meet. 1995, 241.
- (1995) Tech. Dig. - Int. Electron Devices Meet. , pp. 241
- Bohr, M.¹

2
- 0003552056
- Semiconductor Industry Association
- The National Technology Roadmap for Semiconductors, Technology Needs, 1997 Edition (Semiconductor Industry Association, 1997).
- (1997) The National Technology Roadmap for Semiconductors, Technology Needs, 1997 Edition

3
- 0000058188
- S. Lin et al., Proceedings IITC, 2001, p. 146.
- (2001) Proceedings IITC , pp. 146
- Lin, S.¹

4
- 84961752354
- G. Xu, J. He, E. Andideh, J. Bielefeld, and T. Scherbari, Proceedings IITC, 2002, p. 57.
- (2002) Proceedings IITC , pp. 57
- Xu, G.¹ He, J.² Andideh, E.³ Bielefeld, J.⁴ Scherbari, T.⁵

5
- 84961689594
- G. Kloster, T. Scherban, G. Xu, J. Blaine, B. Sun, and Y. Zhou, Proceedings IITC, 2002, p. 242.
- (2002) Proceedings IITC , pp. 242
- Kloster, G.¹ Scherban, T.² Xu, G.³ Blaine, J.⁴ Sun, B.⁵ Zhou, Y.⁶

6
- 0026868336
- S. Venkataraman, D. L. Kohlstedt, and W. W. Gerberich, J. Mater. Res. 7, 1126 (1992).
- (1992) J. Mater. Res. , vol.7 , pp. 1126
- Venkataraman, S.¹ Kohlstedt, D.L.² Gerberich, W.W.³

7
- 0032628351
- H. Ollendorf and D. Schneider, Surf. Coat. Technol. 113, 86 (1999).
- (1999) Surf. Coat. Technol. , vol.113 , pp. 86
- Ollendorf, H.¹ Schneider, D.²

8
- 85081427133
- E. O. Shaffer II, F. J. MCgarry, and L. Hoang, Polym. Eng. Sci. 36, 2366 (1996).
- (1996) Polym. Eng. Sci. , vol.36 , pp. 2366
- Shaffer II, E.O.¹ McGarry, F.J.² Hoang, L.³

9
- 85081424532
- ULSI XII
- E. O. Shaffer II, P. H. Townsend, and J. Im, Proceedings Materials Research Society Conference Proceedings, 1997, ULSI XII, p. 429.
- (1997) Proceedings Materials Research Society Conference Proceedings , pp. 429
- Shaffer II, E.O.¹ Townsend, P.H.² Im, J.³

10
- 0029502626
- Q. Ma, H. Fujimoto, P. Flinn, V. Jain, F. Adibi-Rizi, F. Moghadam, and R. H. Dauskardt, Mater. Res. Soc. Symp. Proc. 391, 91 (1996).
- (1996) Mater. Res. Soc. Symp. Proc. , vol.391 , pp. 91
- Ma, Q.¹ Fujimoto, H.² Flinn, P.³ Jain, V.⁴ Adibi-Rizi, F.⁵ Moghadam, F.⁶ Dauskardt, R.H.⁷

11
- 0030406249
- Q. Ma, C. Pan, H. Fujimoto, B. Triplett, P. Coon, and C. Chiang, Mater. Res. Soc. Symp. Proc. 436, 379 (1996).
- (1996) Mater. Res. Soc. Symp. Proc. , vol.436 , pp. 379
- Ma, Q.¹ Pan, C.² Fujimoto, H.³ Triplett, B.⁴ Coon, P.⁵ Chiang, C.⁶

12
- 0031384881
- Q. Ma, J. Bumgarner, H. Fujimoto, M. Lane, and R. H. Dauskardt, Mater. Res. Soc. Symp. Proc. 473, 3 (1997).
- (1997) Mater. Res. Soc. Symp. Proc. , vol.473 , pp. 3
- Ma, Q.¹ Bumgarner, J.² Fujimoto, H.³ Lane, M.⁴ Dauskardt, R.H.⁵

13
- 0023450177
- P. A. Steinmann, Y. Tardy, and H. E. Hintermann, Thin Solid Films 154, 333 (1987).
- (1987) Thin Solid Films , vol.154 , pp. 333
- Steinmann, P.A.¹ Tardy, Y.² Hintermann, H.E.³

14
- 85081426917
- A. Sekiguchi, K. Ueoka, J. Ye, J. Koike, and K. Maruyama (unpublished)
- A. Sekiguchi, K. Ueoka, J. Ye, J. Koike, and K. Maruyama (unpublished).

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.