Plasma enhanced CVD of low dielectric constant plasma polymerized decahydronaphthalene thin films

Chemical Vapor Deposition

Volumn 8, Issue 1, 2002, Pages 35-37

  Yang, Jaeyoung ^a   Shim, Cheonman ^a   Jung, Donggeun ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Decahydronaphthalene; Low dielectric constant materials; Plasma polymers; Plasma power; Relative dielectric constant; Thermal stability

Indexed keywords

EID: 0039489969     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3862(20020116)8:1<35::AID-CVDE35>3.0.CO;2-B     Document Type: Article

References (10)