Development of electron beam lithography for nanoscale devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5824, Issue , 2005, Pages 23-32

  Zlobin, Vladimir A ^a  

^a ALL RUSSIAN ELECTROTECHNICAL INSTITUTE   (Russian Federation)

Author keywords

Electron beam lithography; Nanolithography; Nanostructures; Theory

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRON BEAMS; LITHOGRAPHY; NANOTECHNOLOGY; X RAY LITHOGRAPHY;

NANOMETER LENGTH SCALE; NANOSCALE STRUCTURES;

NANOSTRUCTURED MATERIALS;

EID: 27644518512     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.604662     Document Type: Conference Paper

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