Low energy electron-beam proximity projection lithography: Discovery of a missing link

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2897-2902

  Utsumi, Takao ^a  

^a Nanolith Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033271254     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591092     Document Type: Article

References (20)

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