Simulation and measurement of resist heating in multipass exposure using a 50 kV variably shaped beam system

Microelectronic Engineering

Volumn 46, Issue 1, 1999, Pages 231-234

  Babin, S ^a   Hartmann, H ^b   Kuzmin, I Yu ^c  

^a Etec Systems Inc   (United States)

^b aiss GmbH   (Germany)

^c Set Service   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; CURRENT DENSITY; FUNCTIONS; HEAT TRANSFER; MULTILAYERS; SUBSTRATES; THERMAL EFFECTS;

HEAT FUNCTION; PROXIMITY EFFECTS; RESIST HEATING; VARIABLY SHAPED BEAM SYSTEMS;

ELECTRON BEAM LITHOGRAPHY;

EID: 0033130710     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00069-6     Document Type: Article

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