Microprocess for fabricating carbon-nanotube probes of a scanning probe microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 661-664

  Nakayama, Yoshikazu ^a   Nishijima, Hidehiro ^a   Akita, Seiji ^a   Hohmura, Ken I ^b   Yoshimura, Shige H ^b   Takeyasu, Kunio ^b  

^a Osaka Prefecture University   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; DNA; ELECTRIC FIELD EFFECTS; ROM; SCANNING ELECTRON MICROSCOPY;

CARBON NANOTUBES; SCANNING PROBE MICROSCOPE;

NANOTUBES;

EID: 0034155797     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591257     Document Type: Article

References (56)

1. International Vacuum Microelectronics Conference, IVMC, Williamsburgh, VA, July 1988.
2. PixTect Inc., Avenue Olivier Perroy, 13790 Rousset, France.
3. Motorola Inc. Research, East Elliot Road, Tempe, AZ 85284.
4. A. Sobel, Sci. Am. 278, 48 (1998).
5. R. Baptist, A. Ghis, and R. Meyer, Second Int. Conf. on Vacuum Microelectronics, Bath, UK, IOP Conf. Series No. 99 (IOP, Bristol, 1989), pp. 57-60.
6. K. Yokoo, G. Koshita, S. Hanazawa, Y. Abe, and Y. Neo, J. Vac. Sci. Technol. B 14, 2096 (1996).
7. G. R. Brandes, C. P. Beetz, C. A. Feger, and R. L. Wright, Diamond Relat. Mater. 4, 586 (1995).
8. M. W. Geis, N. N. Efremov, K. E. Krohn, J. C. Twichell, T. M. Lyszczarz, R. Kalish, J. A. Greer, and M. D. Tabat, Nature (London), Phys. Sci. 393, 431 (1998).
9. R. D. Young, Phys. Rev. 113, 110 (1959).
10. F. Rohrbach, CERN Report No. 71-5/TC-L (1971).
11. G. A. J. Amaratunga and S. R. P. Silva, Appl. Phys. Lett. 68, 2529 (1996).
12. O. Gröning, O. M. Küttel, P. Gröning, and L. Schlapbach, Appl. Surf. Sci. 111, 135 (1997).
13. K. Okano, S. Koizumi, S. Ravi, P. Silva, and G. A. J. Amaratunga, Nature (London), Phys. Sci. 381, 140 (1996).
14. M. W. Geis, J. C. Twichell, J. Macaulay, and K. Okano, Appl. Phys. Lett. 67, 1328 (1995).
15. B. F. Coll, J. E. Jaskie, J. L. Markham, E. P. Menu, A. A. Talin, and P. von Allmen, Mater. Res. Soc. Symp. Proc. 498, 185 (1998).
16. A. G. Rinzler, J. H. Hafner, P. Nikolaev, L. Lou, S. G. Kim, D. Tomanek, P. Nordlander, D. T. Colbert, and R. E. Smalley, Science 269, 1550 (1995).
17. W. A. de Heer, A. Chåtelain, and D. Ugarte, Science 270, 1179 (1995).
18. M. W. Geis, J. C. Twichell, and T. M. Lyszczarz, J. Vac. Sci. Technol. B 14, 2060 (1996).
19. P. H. Cuttler, Z. H. Huang, N. M. Miskovsky, P. D'Ambrosio, and M. Chung, J. Vac. Sci. Technol. B 14, 2020 (1996).
20. R. Schlesser, M. T. McClure, W. B. Choi, J. J. Hren, and Z. Sitar, Appl. Phys. Lett. 70, 1596 (1997).
21. F. Lacher, C. Wild, D. Behr, and P. Koidl, Diamond Relat. Mater. 6, 1111 (1997).
22. O. Gröning, O. M. Küttel, P. Gröning, and L. Schlapbach, J. Vac. Sci. Technol. B 17,. 1970 (1999).
23. J. W. G. Wildoer, L. C. Venema, A. G. Rinzler, R. E. Smalley, and C. Dekker, Nature (London), Phys. Sci. 391, 59 (1998).
24. A. van Oostrom, J. Appl. Phys. 33, 2917 (1962).
25. M. Bockrath, D. H. Cobden, P. L. McEuen, N. G. Chopra, A. Zettl, A. Thess, and R. E. Smalley, Science 275, 1922 (1997).
26. A. Bachtold, M. Henny, C. Strunk, C. Schönenberger, J.-P. Salvetat, J.-M. Bonard, and L. Forro, Appl. Phys. Lett. 73, 274 (1998).
27. S. J. Tans, M. H. Devoret, R. J. A. Groeneveld, and C. Dekker, Nature (London), Phys. Sci. 394, 761 (1998).
28. H. Dai, J. H. Hafner, A. G. Rinzler, D. T. Colbert, and R. E. Smalley, Nature (London), Phys. Sci. 384, 147 (1996).
29. H. Schmid and H.-W. Fink, Appl. Phys. Lett. 70, 2679 (1997).
30. W. A. de Heer, W. S. Bacsa, A. Châtelain, T. Gerfin, R. Humphrey-Baker, L. Forro, and D. Ugarte, Science 268, 845 (1995).
31. J. V. Busch and J. P. Dismukes, Diamond Relat. Mater. 3, 295 (1994).
32. E. Maillard-Schaller, Thesis, University of Fribourg, Switzerland, 1996.
33. V. Ivanov et al. Chem. Phys. Lett. 223, 329 (1994).
34. A. Fonseca, P. Piedigrosso, J.-F. Colomer, K. Mukhopadhyay, and J. B. Nadgy, 193rd Meeting of The Electrochemical Society, San Diego, 1998.
35. Q. H. Wang, T. D. Corrigan, J. Y. Dai, R. P. H. Chang, and A. R. Krauss, Appl. Phys. Lett. 70, 3308 (1997).
36. R. H. Fowler and L. W. Nordheim, Proc. R. Soc. London, Ser. A 119, 173 (1928).
37. O. Gröning, O. M. Küttel, P. Gröning, and L. Schlapbach, Appl. Surf. Sci. 111, 135 (1997).
38. R. L. Fink, Z. L. Tolt, and Z. Yaniv, Surf. Coat. Technol. 108-109, 570 (1998).
39. W. A. de Heer, J.-M. Bonard, K. Fauth, A. Châtelain, L. Forro, and D. Ugarte, Adv. Mater. 9, 87 (1997).
40. Y. Saito, K. Hamaguchi, K. Hata, K. Uchida, Y. Tasaka, F. Ikazaki, M. Yumura, A. Kasuya, and Y. Nishinak, Nature (London), Phys. Sci. 389, 555 (1997).
41. O. M. Küttel, O. Gröning, Ch. Emmenegger, and L. Schlapbach, Appl. Phys. Lett. 73, 2113 (1998).
42. C. Bandis and B. B. Pate, Appl. Phys. Lett. 69, 366 (1996).
43. O. Gröning, O. M. Küttel, P. Gröning, and L. Schlapbach, Appl. Phys. Lett. 71, 2253 (1997).
44. S. C. Sain and K. S. Krishnan, Proc. R. Soc. London, Ser. A 213, 143 (1952).
45. MWNTs and SWNTs were purchased from Materials and Electrochemical Research (MER) Corp., 7960 S. Kolb Rd., Tucson AZ 85706.
46. R. Stratton, Phys. Rev. 135, A794 (1964).
47. E. I. Givargizov, J. Vac. Sci. Technol. B 13, 414 (1994).
48. P. M. May, J. C. Stone, M. N. R. Ashfold, K. R. Hallam, W. N. Wang, and N. A. Fox, Diamond Relat. Mater. 7, 671 (1998).
49. J. Hötzel and F. K. Schulte, Springer Tracts Mod. Phys. 85, 49 (1979).
50. N. D. Lang, Solid State Phys. 28, 225 (1973).
51. L. D. Landau and E. M. Lifshitz, Electrodynamics of Continuous Media (Pergamon, New York. 1960), p. 10.
52. D. M. Wood, Phys. Rev. Lett. 46, 749 (1981).
53. G. Markov, A. Nitzan, and L. E. Brus, J. Chem. Phys. 88, 5076 (1988).
54. V. Bonacic-Koutecky, P. Fantucci, and J. Koutecky, Chem. Rev. 91, 1035 (1991).
55. S. Iijima and T. Ichihashi, Nature (London), Phys. Sci. 358, 220 (1993).
56. D. S. Bethume, C. H. Kiang, M. S. de Vries, G. Gorman, R. Savoy, J. Vasquez, and R. Beyers, Nature (London), Phys. Sci. 363, 605 (1993).