Synthesis of microcrystalline silicon at room temperature using ICP

Electrochemical and Solid-State Letters

Volumn 7, Issue 6, 2004, Pages

  Wu, Jia Hung ^a   Shieh, Jia Min ^b   Dai, Bau Tong ^b   Wu, YewChung Sermon ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; CRYSTALLIZATION; DEPOSITION; DIELECTRIC MATERIALS; DIFFUSION; EPITAXIAL GROWTH; GRAIN SIZE AND SHAPE; HYDROGENATION; INDUCTIVELY COUPLED PLASMA; ION BOMBARDMENT; IONIZATION; SILICON; SYNTHESIS (CHEMICAL);

INTERMETAL DIELECTRICS (IMD); LOW-TEMPERATURE POLYCRYSTALLINE SILICON (LTPS); STRUCTURAL DISORDERS; SURFACE-DIFFUSION MODELS;

ELECTROCHEMISTRY;

EID: 2642527884     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1718258     Document Type: Article

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