Capacitive Stabilization of an Electrostatic Actuator: An Output Feedback Viewpoint

Proceedings of the American Control Conference

Volumn 5, Issue , 2003, Pages 4053-4058

  Maithripala, D H S ^a   Berg, Jordan M ^a   Dayawansa, W P ^a  

^a TEXAS TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRODES; FEEDBACK; MICROELECTROMECHANICAL DEVICES; STABILIZATION; VOLTAGE CONTROL;

CAPACITIVELY-COUPLED CONDUCTORS;

ELECTROSTATIC ACTUATORS;

EID: 0142200025     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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