Surface-micromachined polysilicon MOEMS for adaptive optics

Sensors and Actuators, A: Physical

Volumn 78, Issue 1, 1999, Pages 54-62

  Comtois, John ^b   Michalicek, Adrian ^b   Cowan, William ^a   Butler, Jeffrey ^b  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ADAPTIVE OPTICS; ELECTRONICS PACKAGING; MICROMACHINING; MIRRORS; OPTICAL DEVICES; POLYCRYSTALLINE MATERIALS; POWER ELECTRONICS; SILICON;

MICROOPTELECTROMECHANICAL SYSTEMS (MOEMS); SURFACE-MICROMACHINED POLYSILICON FABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0343462149     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00204-6     Document Type: Article

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