Hardness and Young's modulus of high-quality cubic boron nitride films grown by chemical vapor deposition

Journal of Applied Physics

Volumn 93, Issue 3, 2003, Pages 1515-1519

  Jiang, X ^a   Philip, J ^b   Zhang, W J ^c,d   Hess, P ^b   Matsumoto, S ^c  

^a Fraunhofer Inst Schich/O   (Germany)

^b UNIVERSITY OF HEIDELBERG   (Germany)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^d CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; CHEMICAL VAPOR DEPOSITION; CUBIC BORON NITRIDE; DISPERSION (WAVES); ELASTIC MODULI; GRAIN SIZE AND SHAPE; HARDNESS; SILICON;

TRIBOSCOPES;

THIN FILMS;

EID: 0037322134     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1534625     Document Type: Article

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