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Volumn 7, Issue 2, 1997, Pages 87-104

State-of-the-art vapor-phase deposition of cubic boron nitride

Author keywords

cBN; CVD; Nucleation and growth; PVD

Indexed keywords


EID: 3142514742     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (34)

References (46)
  • 9
    • 0025462188 scopus 로고
    • M. Mieno and T. Yoshida: Jpn. J. Appl. Phys. 29 (1990) L1175. and Surf. Coatings Tech. 52 (1992) 87.
    • (1992) Surf. Coatings Tech. , vol.52 , pp. 87
  • 40
    • 0343039296 scopus 로고    scopus 로고
    • D. Takahashi, S. Amagi and T. Yoshida: Abstract of 9th Sympo. on Plasma Science for Materials, (1996 in Tokyo) paper A2-3 and Appl. Phys. Lett. 70 (1997) 946.
    • (1997) Appl. Phys. Lett. , vol.70 , pp. 946


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.