Applications and requirements for MEMS scanner mirrors

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5719, Issue , 2005, Pages 64-75

  Wolter, Alexander ^a   Hsu, Shu Ting ^a   Schenk, Harald ^a   Lakner, Hubert ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

Laser beam deflection; Laser scanned; Laser scanning; MEMS; Micro mirror; Micro scanning mirror; MOEMS; Optical MEMS

Indexed keywords

CATHODE RAY TUBES; IMAGING SYSTEMS; LASER BEAMS; LIGHT EMITTING DIODES; MICROMACHINING; MIRRORS; OPTICAL FIBERS; OPTICAL RADAR; OPTICAL SYSTEMS; SCANNING;

LASER BEAM DEFLECTION; LASER SCANNED; LASER SCANNING; MICRO MIRRORS; MICRO SCANNING MIRRORS; MOEMS; OPTICAL MEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 21844464574     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600076     Document Type: Conference Paper

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