Micromechanical scanning mirrors with highly reflective NIR coatings for high power applications

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5721, Issue , 2005, Pages 34-42

  Sandner, Thilo ^a   Schmidt, Jan Uwe ^a   Schenk, Harald ^a   Lakner, Hubert ^a   Braun, Stefan ^b   Foltyn, Thomas ^b   Leson, Andreas ^b   Gatto, Alexandre ^c   Yang, Minghong ^c   Kaiser, Norbert ^c  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

^b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

^c FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

High optical power density; Highly reflective mirror coatings; Micro Scanning Mirror; MOEMS; NIR

Indexed keywords

ALUMINUM; DENSITY (OPTICAL); INFRARED RADIATION; LASER BEAM EFFECTS; MIRRORS; OPTICAL COATINGS; PERMITTIVITY; REFLECTION; SCANNING;

HIGH OPTICAL POWER DENSITY; HIGHLY REFLECTIVE MIRROR COATINGS; MICRO SCANNING MIRROR; MOEMS; NIR;

COMPOSITE MICROMECHANICS;

EID: 21844432684     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.590448     Document Type: Conference Paper

References (9)

1. K. E. Peterson: "Silicon Torsional Scanning Mirror", IBM J. Res. Develop., Vol. 24, No 5, 1980, pp. 631-637.
2. W. Dötzel et al: "Silicon Mirrors and Micromirror Arrays for Spatial Laser Beam Modulation", IEEE, Transducers 97, Int. Conf. Solid-State Sensors and Actuators, Chicago, 1997, pp. 81-84.
3. H. Schenk, et al.: "A new driving principle for micromechanical torsional actuators", Micro Electro Mechanical Systems 1999, New York, NY : The American Society of Mechanical Engineers ASME, 1999, pp. 333-338.
4. European Patent EP 1 123 526 B1.
5. H. Schenk, et al.: "Design and modeling of large deflection micromechanical ID and 2D scanning mirrors", SPIE Proc. 4178, 18-19 Sept. 2000, Santa Clara, Calif., pp. 116-125.
6. H. Schenk, et al.: "Large Deflection Micromechanical Scanning Mirrors for Linear Scans and Pattern Generation", Journal of Selected Topics in Quantum Electronics, Vol. 6, No. 5, pp. 715-722 (2000).
7. K.-U. Roscher et al.: "Driver ASIC for synchronized excitation of resonant Micro-Mirrors", Proc. SPIE 4985, Oct 2003, San Jose CA, pp. 121-130.
8. H. Schenk, P. Dürr, Th. Haase, D. Kunze, U. Sobe, H. Lakner, H. Kück, "Large Deflection Micromechanical Scanning Mirrors for Linear Scans and Pattern Generation", Journal of Selected Topics in Quantum Electronics, Vol. 6, No. 5 (2000), p.715-722.
9. H. Grüger, A. Wolter, T. Schuster, H. Schenk, H. Lakner, "Realization of a spectrometer with micromachined scanning grating", SPIE Photonics Fabrication Vol. 4945, Brügge (2002).