Development of a NIR micro spectrometer based on a MOEMS scanning grating

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5455, Issue , 2004, Pages 9-18

  Zimmer, F ^a   Grueger, H ^a   Heberer, A ^a   Wolter, A ^a   Schenk, H ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

MEMS; Micro scanning mirror; MOEMS; Reflection grating; Scanning grating; Spectrometer; Spectroscopy

Indexed keywords

BANDWIDTH; CHARGE COUPLED DEVICES; CHEMICAL SENSORS; DIFFRACTION GRATINGS; DIFFRACTIVE OPTICS; DIGITAL SIGNAL PROCESSING; LIGHT EMITTING DIODES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROOPTICS; NATURAL FREQUENCIES; OPTICAL RESOLVING POWER; SCANNING;

MICRO OPTO ELECTRO MECHANICAL SYSTEMS (MOEMS); MICRO SCANNING MIRRORS; REFLECTION GRATINGS; SCANNING GRATINGS;

INFRARED SPECTROMETERS;

EID: 8844262705     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.544638     Document Type: Conference Paper

References (7)

1. H. Schenk et al., "Large Deflection Micromechanical Scanning Mirrors for Linear Scans and Pattern Generation", IEEE J. of Sel. Topics in Quantum Electr., Vol. 6, pages (1077 ff), 2000
2. H. Schenk et al., "Design optimization of an electrostatically driver Micro Scannino Mirror", Proc. MOEMS and Miniaturized Systems II, editors M. Motamedi, R.Göring, Vol. 4561, pages (35-44), 2001
3. H. Grueger et al., "Realization of a spectrometer with micromachined scanning grating", Proc. Photonics Fabrication, Vol. 4945, Brugge, Belgium, 2002
4. H. Grueger et al., "Performance and Applications of a spectrometer with micromachined scanning grating". Proc. Photonics West, Vol. 4987, San Jose, USA, 2003
5. A. Thorne, U. Litzen, S. Johansson, "Spectrphysics", Springer-Verlag, Heidelberg, 1999
6. M. C. Hutley, "Diffraction gratings", Academic Press Limited, 1982
7. A. Wolter et al., "Improved layout for a resonant 2D micro scanning mirror with low operation voltages", Proc. MOEMS Display and Imaging Systems, Vol. 4985, San Jose, USA, 2003