Torsional MEMS scanner design for high-resolution display systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4773, Issue , 2002, Pages 27-37

  Urey, Hakan ^a  

^a KOÇ UNIVERSITY   (Turkey)

Author keywords

Eigenmodes; MOEMS; Natural frequency; Resonant scanners; RSD; Torsion

Indexed keywords

DISPLAY DEVICES; MICROELECTROMECHANICAL DEVICES; MIRRORS; NATURAL FREQUENCIES; OPTICAL RESOLVING POWER; OSCILLATIONS; STRESS ANALYSIS;

RETINAL SCANNING DISPLAYS (RSD);

SCANNING;

EID: 0036421239     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.469198     Document Type: Conference Paper

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