Mechanical and electrical failures and reliability of Micro Scanning Mirrors

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn 2002-January, Issue , 2002, Pages 212-217

  Gaumont, E ^a   Wolter, A ^a   Schenk, H ^a   Georgelin, G ^a   Schmoger, M ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

Acceleration; Design optimization; Dielectrics and electrical insulation; Electric resistance; Electric shock; Mirrors; Silicon; Springs; Stability; Testing

Indexed keywords

ACCELERATION; CONVERGENCE OF NUMERICAL METHODS; ELECTRIC INSULATION; ELECTRIC INSULATION TESTING; ELECTRIC RESISTANCE; INSULATION; INTEGRATED CIRCUITS; MIRRORS; OPTICAL TESTING; SHOCK TESTING; SILICON; SPRINGS (COMPONENTS); TESTING;

DESIGN OPTIMIZATION; ELECTRIC SHOCK; INSULATION RESISTANCE; MECHANICAL AND ELECTRICAL; MICRO SCANNING MIRROR; OPTIMIZED DESIGNS; RELIABILITY INVESTIGATIONS; SHOCK ACCELERATION;

FAILURE ANALYSIS;

EID: 0037992038     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IPFA.2002.1025665     Document Type: Conference Paper

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