Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 11-12

  Sawada, R ^a   Yamaguchi, J ^a   Higurashi, E ^a   Shimizu, A ^a   Yamamoto, T ^a   Takeuchi, N ^a   Uenishi, Y ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CROSS CONNECTIONS (WATER DISTRIBUTION); MIRRORS; MOEMS; TELECOMMUNICATION NETWORKS; TORSIONAL STRESS;

CROSS-CONNECT SWITCHES; HIGH ASPECT RATIO; LOW APPLIED VOLTAGES; MIRROR SUPPORTS; OPTICAL CROSS-CONNECT; SWITCH MODULES; SWITCHING CHARACTERISTICS; TORSION SPRINGS;

ASPECT RATIO;

EID: 84963770362     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031419     Document Type: Conference Paper

References (3)

1. J. A. Walker, Topical Review The future of MEMS in telecommunications networks, J. Micromech. Microeng., Vol.10 (2000)R1-R7.
2. D. J. Bishop, C. R. Giles, and S. R. Das, IEEE Microwave and Guided Wave Lett., Vol. 8(1998)269-271.
3. R.Sawada, E.Higurashi, A. Shimizu, and T. Maruno, Optical MEMS'2001, pp. 23-24 (Okinawa, Japan), 2001.