A 2-axis comb-driven micromirror array for 3D MEMS switches

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 17-18

  Mizuno, Y ^a   Tsuboi, O ^a   Kouma, N ^a   Soneda, H ^a   Okuda, H ^a   Nakamura, Y ^a   Ueda, S ^a   Sawaki, I ^a   Yamagishi, F ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC SWITCHES; ELECTRODES; FABRICATION; MOEMS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; TORSIONAL STRESS;

BULK- MICROMACHINING; BURIED OXIDE LAYERS; ELECTRODE SUBSTRATES; FLIP CHIP TRANSFER; LARGE DEFLECTION; LOW-DRIVE VOLTAGES; MICROMIRROR ARRAY; STATIONARY OPERATIONS;

SUBSTRATES;

EID: 84963737926     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031422     Document Type: Conference Paper

References (3)

1. Khanh C. Nguyen, OFC2002, pp.89-90
2. O. Tsuboi, Y. Mizuno, N. Kouma, H. Soneda, H. Okuda, S. Ueda, I. Sawaki, F. Yamagishi, MEMS2002, pp. 532-535
3. T. Akashi, S. Takeuchi, T. Yamamoto, K. Mori, M. Goto, I. Sawaki, Submitted to the 2002 Optical Internet and Photonics in Switching.