MEMS 3D optical mirror/scanner

Proceedings - International Conference on MEMS, NANO and Smart Systems, ICMENS 2003

Volumn , Issue , 2003, Pages 222-226

  Zhou, T ^a   Wright, P ^a   Crawford, J ^a   McKinnon, G ^a   Zhang, Y ^b  

^a Micralyne Inc   (Canada)

^b UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Electrostatic actuators; Energy consumption; Interference; Micromechanical devices; Mirrors; Optical device fabrication; Rough surfaces; Silicon; Surface roughness; Voltage

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; ELECTROSTATIC DEVICES; ELECTROSTATICS; ENERGY UTILIZATION; FABRICATION; MIRRORS; MODAL ANALYSIS; SILICON; SILICON WAFERS; SINGLE CRYSTALS; WAVE INTERFERENCE;

ELECTROSTATIC ACTUATION; LATERAL COMB DRIVES; LOWER-POWER CONSUMPTION; MICROMECHANICAL DEVICE; MOVEMENT INTERFERENCE; OPTICAL DEVICE FABRICATION; ROUGH SURFACES; SINGLE CRYSTAL SILICON;

SURFACE ROUGHNESS;

EID: 21044433544     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1221996     Document Type: Conference Paper

References (10)

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