Reducing Cycle Time and Errors in the Design and Layout of MEMS

Proceedings of the ASME Design Engineering Technical Conference

Volumn 2 A, Issue , 2003, Pages 365-373

  Cherry, Michael S ^a   Roach, Gregory M ^a   Wittwer, Jonathan W ^a   Howell, Larry L ^a   Cox, Jordan J ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

Automation; Error reduction; Force gauges; MEMS; Thermal actuators

Indexed keywords

ACTUATORS; COMPUTER AIDED DESIGN; ERROR ANALYSIS; GRAPHICAL USER INTERFACES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PROCESS CONTROL;

ERROR REDUCTION; THERMAL ACTUATORS;

PRODUCT DESIGN;

EID: 1842811132     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/detc2003/dac-48740     Document Type: Conference Paper

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