Growth processes and surface properties of diamondlike carbon films

Journal of Applied Physics

Volumn 97, Issue 10, 2005, Pages

  Liu, Dongping ^a   Zhang, Jialiang ^b   Liu, Yanhong ^b   Xu, Jun ^b   Benstetter, Günther ^a  

^a DEGGENDORF INSTITUTE OF TECHNOLOGY   (Germany)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; ATOMIC HYDROGEN; FILM FORMATION; SURFACE DIFFUSION;

AMORPHOUS MATERIALS; CHEMISORPTION; DEPOSITION; DIFFUSION IN SOLIDS; ELECTRON CYCLOTRON RESONANCE; FILM GROWTH; HARDNESS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

DIAMOND LIKE CARBON FILMS;

EID: 20944444869     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1890446     Document Type: Article

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