Filtered pulsed carbon cathodic arc: Plasma and amorphous carbon properties

Journal of Applied Physics

Volumn 95, Issue 12, 2004, Pages 7624-7631

  Liu, Dongping ^a   Benstetter, Günther ^a   Lodermeier, Edgar ^a   Zhang, Jialiang ^b   Liu, Yanhong ^b   Vancea, Johann ^c  

^a DEGGENDORF INSTITUTE OF TECHNOLOGY   (Germany)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^c UNIVERSITY OF REGENSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; CHEMICAL BONDS; ELECTRONS; FARADAY EFFECT; FRICTION; HARDNESS; IONIZATION; IONS; KINETIC ENERGY; MATRIX ALGEBRA; MICROSTRUCTURE; PLASMAS;

CATHODIC ARC; EXCITATION ENERGIES; ION ENERGIES; TIME-OF-FLIGHT METHODS;

CARBON;

EID: 3142697125     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1753081     Document Type: Article

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