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Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 969-975

Growth mechanism of amorphous hydrogenated carbon

(3) Von Keudell, A a Meier, M a Hopf, C a

a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK (Germany)

Author keywords

Amorphous hydrogenated carbon; Growth; Plasma

Indexed keywords

ELLIPSOMETRY; FILM GROWTH; HYDROCARBONS; INFRARED SPECTROSCOPY; STOICHIOMETRY;

GROWTH ZONES;

CARBON;

CARBON; FILM; HARDNESS; INDUSTRIAL APPLICATION; MECHANICAL PROPERTY; PLASMA TREATMENT;

EID: 0036508397 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(01)00553-2 Document Type: Article

Times cited : (109)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.