Laser annealing for high-Q MEMS resonators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 II, Issue , 2003, Pages 531-535

  Aubin, Keith L ^a   Zalalutdinov, Maxim ^a   Reichenbach, Robert B ^a   Houston, Brian ^b   Zehnder, Alan T ^c   Parpia, Jeevak M ^a   Craighead, Harold G ^a  

^a School of Operations Research and Industrial Engineering   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

^c NONE   (United States)

Author keywords

Laser annealing; MEMS integration; Quality factor; Resonator; Surface losses

Indexed keywords

ANNEALING; HELIUM NEON LASERS; LASER BEAMS; RESONATORS;

LASER ANNEALING; QUALITY FACTOR; SURFACE LOSSES;

MICROELECTROMECHANICAL DEVICES;

EID: 0041327999     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.499109     Document Type: Conference Paper

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