Characterization of silicon micro-oscillators by scanning laser vibrometry

Review of Scientific Instruments

Volumn 73, Issue 10, 2002, Pages 3584-

  Vignola, J F ^a   Liu, X ^a   Morse, S F ^b   Houston, B H ^b   Bucaro, J A ^b   Marcus, M H ^b   Photiadis, D M ^b   Sekaric, L ^c  

^a SFA INC   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

^c Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 18744413230     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1502014     Document Type: Article

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