Temperature-dependent internal friction in silicon nanoelectromechanical systems

Applied Physics Letters

Volumn 77, Issue 15, 2000, Pages 2397-2399

  Evoy, S ^a   Olkhovets, A ^b   Sekaric, L ^b   Parpia, J M ^b   Craighead, H G ^b   Carr, D W ^c  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

^b Department of Population Medicine and Diagnostic Sciences   (United States)

^c LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000033402     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1316071     Document Type: Article

References (12)

1. A. N. Cleland and M. L. Roukes, Nature (London) 392, 160 (1998).
2. T. D. Stowe, K. Yasumura, T. W. Kenny, D. Botkin, K. Wago, and D. Rugar, Appl. Phys. Lett. 71, 288 (1997).
3. C. T.-C. Nguyen, 1999 IEEE MTT-S International Microwave Symposium RF MEMS Workshop. Anaheim, California, June 18, 1999, pp. 48-77.
4. T. S. Ke, Phys. Rev. 72, 41 (1947).
5. X. Liu and R. O. Pohl, Phys. Rev. B 58, 9067 (1998).
6. X. Liu, U. Thompson, B. E. White, Jr., and R. O. Pohl, Phys. Rev. B 59, 11767 (1999).
7. D. W. Carr, S. Evoy, L. Sekaric, J. M. Parpia, and H. G. Craighead, Appl. Phys. Lett. 75, 920 (1999).
8. S. Evoy, D. W. Carr, L. Sekaric, A. Olkhovets, J. M. Parpia, and H. G. Craighead, J. Appl. Phys. 86, 6072 (1999).
9. K. Y. Yasumura, T. D. Stowe, E. M. Chow, T. Pfafman, T. W. Kenny, B. C. Stipe, and D. Rugar, IEEE J. Microelectromechanical Systems 9, 117 (2000).
10. B. S. Berry and W. C. Pritchet, J. Appl. Phys. 67, 3661 (1990).
11. D. W. Carr, L. Sekaric, and H. G. Craighead, J. Vac. Sci. Technol. B 16, 3821 (1998).
12. K. L. Ekinci, Y.-T. Yang, X.-M. Huang, and M. L. Roukes, Bull. Am. Phys. Soc. 45, 600 (2000).