Temperature-dependent internal friction in silicon nanoelectromechanical systems

Applied Physics Letters

Volumn 77, Issue 15, 2000, Pages 2397-2399

  Evoy, S ^a   Olkhovets, A ^b   Sekaric, L ^b   Parpia, J M ^b   Craighead, H G ^b   Carr, D W ^c  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

^b Department of Obstetrics Gynecology   (United States)

^c LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000033402     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1316071     Document Type: Article

References (12)

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