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Volumn 44, Issue 12-15, 2005, Pages

Epitaxial lateral overgrowth of high Al composition AlGaN alloys on deep grooved SiC substrates

Author keywords

Aluminum gallium nitride; Aluminum nitride; Epitaxial lateral overgrowth; Metalorganic chemical vapor deposition; Threading dislocations; Transmission electron microscopy

Indexed keywords

ALUMINUM; ALUMINUM NITRIDE; AMMONIA; ATOMIC FORCE MICROSCOPY; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 20444467370     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.L405     Document Type: Article
Times cited : (41)

References (24)
  • 13
    • 2542503617 scopus 로고    scopus 로고
    • and references therein
    • P. Gibart: Rep. Prog. Phys. 67 (2004) 667 and references therein.
    • (2004) Rep. Prog. Phys. , vol.67 , pp. 667
    • Gibart, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.