Development of three-dimensional inductors using plastic deformation magnetic assembly (PDMA)

IEEE Transactions on Microwave Theory and Techniques

Volumn 51, Issue 4 I, 2003, Pages 1067-1075

  Zou, Jun ^a   Liu, Chang ^a   Trainor, Drew R ^a   Chen, Jack ^a   Schutt Ainé, Jose E ^a   Chapman, Patrick L ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

On chip solenoid inductor; Plastic deformation magnetic assembly (PDMA); Three dimensional (3 D) assembly; Vertical spiral inductor

Indexed keywords

ASSEMBLY; INTEGRATED CIRCUIT LAYOUT; PLASTIC DEFORMATION; SOLENOIDS; WIRELESS TELECOMMUNICATION SYSTEMS;

MAGNETIC ASSEMBLIES;

ELECTRIC INDUCTORS;

EID: 0037397462     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2003.809674     Document Type: Article

References (27)

1. J. R. Long and M. A. Copeland, "The modeling, characterization, and design of monolithic inductors for silicon RF IC's," IEEE J. Solid-State Circuits, vol. 32, pp. 357-369, Mar. 1997.
2. C. P. Yue and S. S. Wong, "Physical modeling of spiral inductors on silicon," IEEE Trans. Electron Devices, vol. 47, pp. 560-568, Mar. 2000.
3. K. B. Ashby, I. A. Koullias, W. C. Finley, J. J. Bastek, and S. Moinian, "High Q inductors for wireless applications in a complementary silicon bipolar process," IEEE J. Solid-State Circuits, vol. 31, pp. 4-9, Jan. 1996.
4. B. K. Kim, B. K. Ko, and K. Lee, "Monolithic planar RF inductor and waveguide structures on silicon with performance comparable to those in GaAs MMIC," in IEEE Electron Devices Meeting Dig., 1995, pp. 717-720.
5. P. Pieters, K. Vaesen, W. Diels, G. Carchon, S. Brebels, W. D. Raedt, E. Beyne, and R. P. Mertens, "High-Q integrated spiral inductors for high performance wireless front-end systems," in Proc. IEEE Radio and Wireless Conf., 2000, pp. 251-254.
6. M. Ozgur, M. Zaghloul, and M. Gaitan, "High Q backside micromachined CMOS inductors," in Proc. IEEE Int. Circuits and Systems Symp., 1999, pp. 577-580.
7. C. Y. Lee, Y.-H. Kao, J.-J. Luo, and K.-M. Chang, "The enhanced Q spiral inductors with MEMS technology for RF applications," in Proc. IEEE Asia-Pacific Microwave Conf., 2000, pp. 1326-1329.
8. R. P. Ribas, J. Lescot, J.-L. Leclercq, J. M. Karam, and F. Ndagijimana, "Micromachined microwave planar spiral inductors and transformers," IEEE Trans. Microwave Theory Tech., vol. 48, pp. 1326-1335, Aug. 2000.
9. J. Y.-C. Chang, A. A. Abidi, and M. Gaitain, "Large suspended inductors on silicon and their use in a 2-μm CMOS RF amplifier," IEEE Electron Device Lett., vol. 14, pp. 246-248, May 1993.
10. L.-H. Lu, G. E. Ponchak, P. Bhattacharya, and L. P. B. Katehi, "High-Q X-band and K-band micromachined spiral inductors for use in Si-based integrated circuits," in Proc. IEEE Topical on Silicon Monolithic Integrated Circuits in RF Systems Meeting, 2000, pp. 108-112.
11. H.-R. Jiang, Y. Wang, J.-L. A. Yeh, and N. C. Tien, "On-chip spiral inductors suspended over deep copper-lined cavities," IEEE Trans. Microwave Theory Tech., vol. 48, pp. 2415-2423, Dec. 2000.
12. J. B. Yoon, C. H. Han, E. Yoon, and C. K. Kim, "High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC," in IEEE MTT-S Int. Microwave Symp. Dig., 1999, pp. 1523-26.
13. J. Y. Park and M. G. Allen, "Packaging-compatible high Q microinductors and microfilters for wireless applications," IEEE Trans. Adv. Packag., vol. 22, pp. 207-213, May 1999.
14. K. Grenier, B. P. Barber, V. Lubecke, M. Zierdt, H. Safar, P. Pons, and P. L. Gammel, "Integrated RF MEMS for single chip radio," in Proc. Int. Solid-State Sensors and Actuators Conf., 2001, pp. 1528-1531.
15. G. W. Dahlmann, E. M. Yeatman, P. R. Young, I. D. Robertson, and S. Lucyszyn, "MEMS high Q microwave inductors using solder surface tension self-assembly," in IEEE MTT-S Int. Microwave Symp. Dig., 2001, pp. 329-332.
16. J. Zou, J. Chen, C. Liu, and J. E. Schutt-Ainé, "Plastic deformation magnetic assembly (PDMA) of out-of-plane microstructures: Technology development and application," IEEE J. Microelectromech. Syst., vol. 10, pp. 302-309, June 2001.
17. D. J. Young, V. Malba, J.-J. Ou, A. F. Bernhardt, and B. E. Boser, "Monolithic high-performance three-dimensional coil inductors for wireless communication applications," in IEEE Electron Device Meeting Dig., 1997, pp. 67-70.
18. Y.-J. Kim and M. G. Allen, "Surface micromachined solenoid inductors for high frequency applications," IEEE Trans. Comp., Pack., Manufact. Technol., vol. 21, pp. 26-33, Jan. 1998.
19. J.-B. Yoon, B.-K. Kim, C.-H. Han, E. Yoon, and C.-K. Kim, "Surface micromachined solenoid on-Si and on-glass inductors for RF applications," IEEE Electron Device Lett., vol. 20, pp. 487-489, Sept. 1999.
20. J. Zou, J. G. Nickel, D. R. Trainor, C. Liu, and J. E. Schutt-Ainé, "Development of vertical planar coil inductors using plastic deformation magnetic assembly (PDMA)," in IEEE MTT-S Int. Microwave Symp. Dig., 2001, pp. 193-196.
21. C. A. Balanis, Advanced Engineering Electromagnetics. New York: Wiley, 1989.
22. C. Liu, "Micromachined sensors and actuators for fluid mechanics applications," Ph.D. dissertation, California Inst. Technol., Pasadena, CA, 1996.
23. W. B. Kuhn and N. M. Ibrahim, "Analytical modeling of current crowding effects in multiturn spiral inductors," IEEE Trans. Microwave Theory Tech., vol. 49, pp. 31-38, Jan. 2001.
24. J. Sieiro, J. M. Lopez-Villegas, J. Cabanillas, J. A. Osorio, and J. Samitier, "A physical frequency-dependent compact model for RF integrated inductors," IEEE Trans. Microwave Theory Tech., vol. 50, pp. 384-392, Jan. 2002.
25. H.-S. Tsai, J. Lin, R. C. Frye, K. L. Tai, M. Y. Lau, D. Kossives, F. Heycenko, and Y.-K. Chen, "Investigation of current crowding effect on spiral inductors," in IEEE MTT-S Int. Microwave Symp. Dig., 1997, pp. 139-142.
26. E. McShane and K. Shenai, "A CMOS monolithic 5 MHz, 5 V, 250 mA, 56% efficiency switch-mode boost converter with dynamic PWM for embedded power management," in IEEE Industry Applications Soc. Annu. Conf. Rec., 2001, pp. 653-657.
27. S. Musunuri and P. L. Chapman, "Optimization issues for fully-integrated CMOS DC-DC converters," in IEEE Industry Applications Soc. Annu. Conf. Rec., Oct. 2002, pp. 2405-2410.