Silicon bridge type micro-gas sensor array

Sensors and Actuators, B: Chemical

Volumn 108, Issue 1-2 SPEC. ISS., 2005, Pages 271-277

  Moon, Byeong Ui ^a   Lee, Jeong Min ^a   Shim, Chang Hyun ^b   Lee, Myoung Bok ^a   Lee, Jong Hyun ^a   Lee, Duk Dong ^a   Lee, Jong Ho ^a  

^a Kyungpook National University   (South Korea)

^b Sense and Sensor Co Ltd   (South Korea)

Author keywords

MEMS; Micro gas sensor; Power consumption

Indexed keywords

ANISOTROPY; ETCHING; ETHANOL; HYDROGEN SULFIDE; MICROSENSORS; SILICON; THIN FILMS;

MEMS; MICRO GAS SENSORS; POWER CONSUMPTION; ULTRA-THIN SILICON MEMBRANES;

CHEMICAL SENSORS;

EID: 19744372714     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.01.042     Document Type: Conference Paper

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