Makyoh-topography assessment of the deformation of micromachined membrane structures on double-side coated substrates

Sensors and Actuators, A: Physical

Volumn 102, Issue 1-2, 2002, Pages 123-129

  Riesz, Ferenc ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

Deformation; Makyoh topography; Membrane; Micromachining

Indexed keywords

DEFORMATION; IMAGING TECHNIQUES; INTERFEROMETERS; MICROMACHINING; SURFACE TOPOGRAPHY;

PHASE STEPPING INTERFEROMETRY;

SILICON NITRIDE;

EID: 0036894534     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00296-0     Document Type: Article

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