An experimental study on high-temperature metallization for micro-hotplate-based integrated gas sensors

Sensors and Actuators, B: Chemical

Volumn 86, Issue 1, 2002, Pages 1-11

  Yan, Guizhen ^b   Tang, Zhenan ^a,c   Chan, Philip C H ^a   Sin, Johnny K O ^a   Hsing, I Ming ^c   Wang, Yangyuan ^b  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b PEKING UNIVERSITY   (China)

^c DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

MEMS; Metal electrode; Metallization

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRODES; HIGH TEMPERATURE APPLICATIONS; HIGH TEMPERATURE OPERATIONS; METALLIZING; MICROELECTROMECHANICAL DEVICES; MORPHOLOGY; POLYSILICON; SCANNING ELECTRON MICROSCOPY; SURFACES; X RAY PHOTOELECTRON SPECTROSCOPY;

INTEGRATED GAS SENSORS;

CHEMICAL SENSORS;

EID: 0037199906     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(02)00070-9     Document Type: Article

References (12)

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9. 2 thick-film gas sensor
10. 2 sensors: Current status and future prospects