Thermistor-like pn junction temperature-sensor with variable sensitivity and its combination with a micro-air-bridge heater

Sensors and Actuators, A: Physical

Volumn 108, Issue 1-3, 2003, Pages 239-243

  Kimura, Mitsuteru ^a   Toshima, Katsuhisa ^a  

^a TOHOKU GAKUIN UNIVERSITY   (Japan)

Author keywords

Air bridge; Heater; pn junction; Silicon; Temperature sensor; Thermal sensor

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC POTENTIAL; FEEDBACK CONTROL; FERMI LEVEL; SEMICONDUCTING SILICON; SEMICONDUCTOR DIODES; SEMICONDUCTOR JUNCTIONS; SENSITIVITY ANALYSIS; TEMPERATURE MEASUREMENT; THERMISTORS;

MICRO-AIR-BRIDGE HEATERS; TEMPERATURE SENSORS; THERMAL TIME CONSTANT;

SENSORS;

EID: 0344083391     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00290-5     Document Type: Conference Paper

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