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Thin Solid Films

Volumn 391, Issue 2, 2001, Pages 261-264

Front-side micromachined porous silicon nitrogen dioxide gas sensor

(6) Baratto, C a Faglia, G a Sberveglieri, G a Boarino, L b Rossi, A M b Amato, G b

a UNIVERSITY OF BRESCIA (Italy)

b ISTITUTO ELETTROTECNICO NAZIONALE GALILEO FERRARIS (Italy)

Author keywords

Front side micromachining; Gas sensor; Nitrogen dioxide; Porous silicon

Indexed keywords

ATMOSPHERIC HUMIDITY; CARBON MONOXIDE; CRYSTALLINE MATERIALS; ETHANOL; METHANOL; MICROMACHINING; NITROGEN OXIDES; OXIDATION; POROUS SILICON; SILICON SENSORS;

FRONT SIDE MICROMACHINING;

CHEMICAL SENSORS;

EID: 0035898912 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)00992-0 Document Type: Conference Paper

Times cited : (57)

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