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Volumn 391, Issue 2, 2001, Pages 261-264
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Front-side micromachined porous silicon nitrogen dioxide gas sensor
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Author keywords
Front side micromachining; Gas sensor; Nitrogen dioxide; Porous silicon
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Indexed keywords
ATMOSPHERIC HUMIDITY;
CARBON MONOXIDE;
CRYSTALLINE MATERIALS;
ETHANOL;
METHANOL;
MICROMACHINING;
NITROGEN OXIDES;
OXIDATION;
POROUS SILICON;
SILICON SENSORS;
FRONT SIDE MICROMACHINING;
CHEMICAL SENSORS;
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EID: 0035898912
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)00992-0 Document Type: Conference Paper |
Times cited : (57)
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References (17)
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