Fabrication and characterization of micro-heaters with low-power consumption using SOI membrane and trench structures

Sensors and Actuators, A: Physical

Volumn 112, Issue 1, 2004, Pages 55-60

  Chung, Gwiy Sang ^a  

^a Dongseo University   (South Korea)

Author keywords

Micro heater; SOI membrane; Thermal MEMS; Trench

Indexed keywords

ACTUATORS; ANNEALING; COMPUTER SIMULATION; DIELECTRIC MATERIALS; HEATING; MAGNESIUM COMPOUNDS; MICROMACHINING; PHOTOLITHOGRAPHY; SENSORS; SILICON ON INSULATOR TECHNOLOGY; SPECIFIC HEAT; THERMAL CONDUCTIVITY; THERMAL INSULATION; THERMOMETERS;

MICRO-HEATERS; SOI MEMBRANES; THERMAL MEMS; TRENCH;

MICROELECTROMECHANICAL DEVICES;

EID: 2142758678     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.076     Document Type: Article

References (16)

1. Sarro P.M. Sensor technology strategy in silicon. Sens. Actuators A. 33:1992;138-143.
2. Gajda M.A., Ahmed H. Applications of thermal silicon sensors on membranes. Sens. Actuators A. 49:1995;1-9.
3. L. Qui, E. Obermeier, A. Schubert, A microsensor with integrated heat sink and flow guide for gas flow sensing application, in: Proceedings of the 8th International Conference on Solid-Sate Sensors and Actuators, Stockholm, Sweden, 25-29 June 1995, pp. 520-523.
4. Parameswaran M. Micromachined thermal radiation emitter from a commercial CMOS process. IEEE Electron Device Lett. 13:1991;57-59.
5. Yoon E., Wise K.D. An integrated mass flow sensor with on-chip CMOS interface circuitry. IEEE Trans. Electron Devices. 39:1992;1376-1386.
6. Gardner J.W., Pike A., de Rooij N.F., Hep M.K., Clerc P.A., Hierlemann A., Gopel W. Integrated array sensor for detecting organic solvents. Sens. Actuators B. 26:1995;135-139.
7. Dibbern U. A substrate for thin film gas sensors in microelectronic technology. Sens. Actuators B. 2:1990;63-67.
8. Klaassen E.H., Reay R.J., Kovacs G.T.A. Diode-based thermal rms converter with on-chip circuitry fabricated using CMOS technology. Sens. Actuators A. 52:1996;33-40.
9. D. Mutschall, C. Scheibe, E. Obermeier, Basic micro module for chemical sensors with on chip heater and buried sensor structure, in: Proceedings of the 8th International Conference on Solid-Sate Sensors and Actuators, Stockholm, Sweden, 25-29 June 1995, pp. 256-259.
10. Lee S.H., Sub I.C., Sung Y.K. A thermal properties of micro hot plate and the characteristics of Pt/Cr bilayers due to annealing temperatures. J. Korean Sens. Soc. 5:1996;69-77.
11. Chung G.S., Noh S.S. The fabrication of Pt micro heater using aluminum oxide as medium layer and its characteristics. Sens. Mater. 10:1998;251-261.
12. Chung G.S., Hong S.W. Fabrication of Pt thin-film type microheater for thermal microsensors and its characteristics. J. KIEEME. 13:2000;509-513.
13. Chung G.S. Anisotropic etching characteristics of silicon in TMAH: IPA: pyrazine solutions. Sens. Mater. 12:2000;133-142.
14. Chung G.S., Hong S.W. The fabrication and characteristics of RTD (resistance thermometer device) for micro thermal sensors. J. Korean Sens. Soc. 9:2000;171-176.
15. Chung G.S., Noh S.S. The study on formation of platinum thin films for RTD temperature sensor. J. KIEEME. 9:1996;911-917.
16. Chung G.S., Noh S.S. The study on characteristics of platinum thin film RTD temperature sensors with annealing conditions. J. Korean Sens. Soc. 6:1997;81-86.