Microfabrication and reliability study of sapphire based Ti/Pt-electrodes for thin-film gas sensor applications

Microelectronics Journal

Volumn 31, Issue 7, 2000, Pages 561-567

  Qu, W ^a,b   Wlodarski, W ^a   Austin, M ^a  

^a RMIT UNIVERSITY   (Australia)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Diffusion; Harsh environment; Ozone sensor; Sapphire; Thermodynamic stability; Thin film; Ti Pt electrode

Indexed keywords

EID: 0141994057     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2692(00)00030-6     Document Type: Article

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