Study of the extrinsic parasitics in nano-scale transistors

Semiconductor Science and Technology

Volumn 20, Issue 6, 2005, Pages 652-657

  Xiong, Shiying ^a   King, Tsu Jae ^a   Bokor, Jeffrey ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; CAPACITANCE; COMPUTER SIMULATION; CONCENTRATION (PROCESS); CONFORMAL MAPPING; DIELECTRIC MATERIALS; DOPING (ADDITIVES);

EQUIVALENT OXIDE THICKNESS (EOT); GATE DIELECTRIC; LOW-OPERATING-POWER (LOP); NANO-SCALE TRANSISTORS;

MOSFET DEVICES;

EID: 18744405688     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/20/6/029     Document Type: Article

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