Advantages and disadvantages of TEM sample preparation using the FIB technique;Vor- und nachteile der TEM-probenpräparation mittels FIB

Praktische Metallographie/Practical Metallography

Volumn 40, Issue 4, 2003, Pages 163-174

  Engelmann, Hans Jürgen ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIZATION; CRYSTAL STRUCTURE; FOCUSING; ION BEAMS; ION IMPLANTATION; MICROSTRUCTURE; SAMPLING; SPUTTERING; CONDENSED MATTER PHYSICS;

FOCUSED ION BEAMS; SAMPLE PREPARATION; TARGET PREPARATION;

TRANSMISSION ELECTRON MICROSCOPY; MAGNETIC MATERIALS;

IT FOCUS; PREPARATION METHOD; TARGET PREPARATION; TEM SAMPLE PREPARATION;

EID: 0037666434     PISSN: 0032678X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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