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Volumn 28, Issue 3, 1997, Pages 249-265

Automated crystal lattice orientation mapping using a computer-controlled sem

Author keywords

ACOM; Backscatter Kikuchi pattern; BKD; BKP; Crystal texture; EBSD; Grain boundary; OIM; Phase discrimination

Indexed keywords


EID: 0030987694     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(97)00010-3     Document Type: Review
Times cited : (147)

References (66)
  • 1
    • 51249164626 scopus 로고
    • Orientation imaging: The emergence of a new microscopy
    • Adams, B. L., Wright, S. I. and Kunze, K., 1993. Orientation imaging: the emergence of a new microscopy. Metallurgical Transactions, 24A, 819-831.
    • (1993) Metallurgical Transactions , vol.24 A , pp. 819-831
    • Adams, B.L.1    Wright, S.I.2    Kunze, K.3
  • 4
    • 0009044094 scopus 로고
    • Über bänder bei elektronenbeugung
    • Boersch, H., 1937. Über Bänder bei Elektronenbeugung. Phys. Z., 38, 1000-1004.
    • (1937) Phys. Z. , vol.38 , pp. 1000-1004
    • Boersch, H.1
  • 7
    • 0021449347 scopus 로고
    • Diffraction from sub-micron areas using electron backscattering in a scanning electron microscope
    • Dingley, D. J., 1984. Diffraction from sub-micron areas using electron backscattering in a scanning electron microscope. Scanning Electron Microscopy, 2, 569-575.
    • (1984) Scanning Electron Microscopy , vol.2 , pp. 569-575
    • Dingley, D.J.1
  • 8
    • 0015067484 scopus 로고
    • Verbessertes verfahren zur bestimmung des mittleren inneren potentials aus reflexions-Kikuchi-diagrammen
    • Gaukler, K. H. and Schwarzer, R., 1971. Verbessertes Verfahren zur Bestimmung des mittleren inneren Potentials aus Reflexions-Kikuchi-Diagrammen. Optik, 33, 215-229.
    • (1971) Optik , vol.33 , pp. 215-229
    • Gaukler, K.H.1    Schwarzer, R.2
  • 9
    • 0000755930 scopus 로고
    • Graphical representation of grain and hillock orientations in annealed Al-1%Si films
    • Gerth, D. and Schwarzer, R. A., 1993. Graphical representation of grain and hillock orientations in annealed Al-1%Si films. Textures and Microstructures, 21, 177-193.
    • (1993) Textures and Microstructures , vol.21 , pp. 177-193
    • Gerth, D.1    Schwarzer, R.A.2
  • 11
    • 0004683744 scopus 로고
    • Bestimmung des mittleren inneren potentials aus Kikuchi-diagrammen von Wolfram-einkristallen
    • von Grote, K. H., 1968/69. Bestimmung des mittleren inneren Potentials aus Kikuchi-Diagrammen von Wolfram-Einkristallen. Optik, 28, 374-388.
    • (1968) Optik , vol.28 , pp. 374-388
    • Von Grote, K.H.1
  • 12
    • 0002582917 scopus 로고
    • Anomalous electron absorption effects in metal foils
    • Hashimoto, H., Howie, A. and Whelan, M. J., 1962. Anomalous electron absorption effects in metal foils. Proc. Royal Soc., 269A, 80.
    • (1962) Proc. Royal Soc. , vol.269 A , pp. 80
    • Hashimoto, H.1    Howie, A.2    Whelan, M.J.3
  • 13
    • 0342523268 scopus 로고
    • Ein Zusatzgerät für Elektronenbeugung mit streifendem einfall
    • Heise, F., 1952. Ein Zusatzgerät für Elektronenbeugung mit streifendem Einfall. Optik, 9, 139-142.
    • (1952) Optik , vol.9 , pp. 139-142
    • Heise, F.1
  • 20
    • 0017497317 scopus 로고
    • Some new techniques in reflection high energy electron diffraction (RHEED). Application to surface structure studies
    • Ino, Sh., 1977. Some new techniques in reflection high energy electron diffraction (RHEED). Application to surface structure studies. Jap. J. Appl. Phys., 16, 891-908.
    • (1977) Jap. J. Appl. Phys. , vol.16 , pp. 891-908
    • Ino, Sh.1
  • 21
    • 0343828570 scopus 로고
    • Local texture measurements by EBSP. New computer procedures
    • Juul Jensen, D. and Schmidt, N. H., 1991. Local texture measurements by EBSP. New computer procedures. Textures and Microstructures, 14-18, 97-102.
    • (1991) Textures and Microstructures , vol.14-18 , pp. 97-102
    • Juul Jensen, D.1    Schmidt, N.H.2
  • 22
    • 0002399547 scopus 로고
    • Computer-aided determination of crystal-lattice orientation from electron-channeling patterns in the SEM
    • Schmidt, N. H. and Diesen, N. Ø., 1989. Computer-aided determination of crystal-lattice orientation from electron-channeling patterns in the SEM. Canadian Mineralogist, 27, 15-22.
    • (1989) Canadian Mineralogist , vol.27 , pp. 15-22
    • Schmidt, N.H.1    Diesen, N.O.2
  • 23
    • 0002854347 scopus 로고
    • Diffraction of cathode rays by mica
    • Kikuchi, S., 1928. Diffraction of cathode rays by mica. Jap. J. Phys., 5, 83-96.
    • (1928) Jap. J. Phys. , vol.5 , pp. 83-96
    • Kikuchi, S.1
  • 24
    • 0026772737 scopus 로고
    • Image processing procedures for analysis of electron backscattering patterns
    • Krieger Lassen, N. C., Juul Jensen, D. and Conradsen, K., 1992. Image processing procedures for analysis of electron backscattering patterns. Scanning Microscopy, 6, 115-121.
    • (1992) Scanning Microscopy , vol.6 , pp. 115-121
    • Krieger Lassen, N.C.1    Juul Jensen, D.2    Conradsen, K.3
  • 25
    • 0027287563 scopus 로고
    • Calibration of an electron back-scattering pattern set-up
    • Krieger Lassen, N. C. and Bilde-Sørensen, J. B., 1993. Calibration of an electron back-scattering pattern set-up. J. Microscopy, 170, 125-129.
    • (1993) J. Microscopy , vol.170 , pp. 125-129
    • Krieger Lassen, N.C.1    Bilde-Sørensen, J.B.2
  • 27
    • 0002648987 scopus 로고
    • Computerized analysis of Kikuchi patterns
    • eds N. Hansen, D. Juul Jensen, Y. L. Liu and B. Ralph. Roskilde
    • Krieger Lassen, N. C., 1995. Computerized analysis of Kikuchi patterns. Proc. 16th Risø Intern. Symp. on Materials Science, eds N. Hansen, D. Juul Jensen, Y. L. Liu and B. Ralph. Roskilde, pp. 405-411.
    • (1995) Proc. 16th Risø Intern. Symp. on Materials Science , pp. 405-411
    • Krieger Lassen, N.C.1
  • 29
    • 0343392878 scopus 로고
    • Crystallographic phase identification in the scanning electron microscope: Backscattered electron Kikuchi patterns imaged with a CCD-based detector
    • Michael, J. R. and Goehner, R. P., 1993. Crystallographic phase identification in the scanning electron microscope: Backscattered electron Kikuchi patterns imaged with a CCD-based detector. MSA Bulletin, 23, 168-175.
    • (1993) MSA Bulletin , vol.23 , pp. 168-175
    • Michael, J.R.1    Goehner, R.P.2
  • 30
    • 0018206426 scopus 로고
    • Physical background of electron backscattering
    • Niedrig, H., 1978. Physical background of electron backscattering. Scanning, 1, 17-34.
    • (1978) Scanning , vol.1 , pp. 17-34
    • Niedrig, H.1
  • 31
    • 0343392877 scopus 로고
    • The diffraction of cathode rays by calcite
    • Nishikawa, Sh. and Kikuchi, S., 1928. The diffraction of cathode rays by calcite. Proc. Imp. Acad. Japan, 4, 475-477.
    • (1928) Proc. Imp. Acad. Japan , vol.4 , pp. 475-477
    • Nishikawa, Sh.1    Kikuchi, S.2
  • 32
    • 0001169360 scopus 로고
    • Über die bestimmung von funktionen durch ihre integralwerte längs gewisser mannigfaltigkeiten. Berichte sächsische akademie der wissenschaften
    • Radon, J., 1917. Über die Bestimmung von Funktionen durch ihre Integralwerte längs gewisser Mannigfaltigkeiten. Berichte Sächsische Akademie der Wissenschaften. Math.-Phys. Klasse, Leipzig, 69, 262-267.
    • (1917) Math.-Phys. Klasse, Leipzig , vol.69 , pp. 262-267
    • Radon, J.1
  • 35
    • 0018649363 scopus 로고
    • Electron diffraction methods in TEM, STEM and SEM
    • Reimer, L., 1979. Electron diffraction methods in TEM, STEM and SEM. Scanning, 2, 3-19.
    • (1979) Scanning , vol.2 , pp. 3-19
    • Reimer, L.1
  • 36
    • 0343392875 scopus 로고
    • Zur aufzeichnung von elektronen-rückstreu-diagammen (EBSP) in einem SEM
    • Reimer, L. and Grün, D., 1986. Zur Aufzeichnung von Elektronen-Rückstreu-Diagammen (EBSP) in einem SEM. BEDO, 19, 105-110.
    • (1986) BEDO , vol.19 , pp. 105-110
    • Reimer, L.1    Grün, D.2
  • 37
    • 84984059530 scopus 로고
    • Kikuchi band contrast in diffraction patterns recorded by transmitted and backscattered electrons
    • Reimer, L., Heilers, U. and Saliger, G., 1986. Kikuchi band contrast in diffraction patterns recorded by transmitted and backscattered electrons. Scanning, 8, 101-118.
    • (1986) Scanning , vol.8 , pp. 101-118
    • Reimer, L.1    Heilers, U.2    Saliger, G.3
  • 38
    • 0343392876 scopus 로고
    • Zur untersuchung des reziproken gitters von einkristallen mit hilfe von Kikuchi-diagrammen
    • Riecke, W. D. and Sakaki, Y., 1959. Zur Untersuchung des reziproken Gitters von Einkristallen mit Hilfe von Kikuchi-Diagrammen. Z. Physik, 156, 534-554.
    • (1959) Z. Physik , vol.156 , pp. 534-554
    • Riecke, W.D.1    Sakaki, Y.2
  • 39
    • 0026220387 scopus 로고
    • Band positions used for on-line crystallographic orientation determination from electron back scattering patterns
    • Schmidt, N. H., Bilde-Sørensen, J. B. and Juul Jensen, D., 1991. Band positions used for on-line crystallographic orientation determination from electron back scattering patterns. Scanning Electron Microscopy, 5, 637-643.
    • (1991) Scanning Electron Microscopy , vol.5 , pp. 637-643
    • Schmidt, N.H.1    Bilde-Sørensen, J.B.2    Juul Jensen, D.3
  • 41
    • 0021556843 scopus 로고
    • On-line computerized evaluation of Kikuchi patterns for the determination of preferred orientations and orientation correlations
    • Schwarzer, R. and Weiland, H., 1984. On-line computerized evaluation of Kikuchi patterns for the determination of preferred orientations and orientation correlations. Proc. 7th Intern. Conf. on Textures of Materials (ICOTOM 7), Holland 1984, pp. 839-843.
    • (1984) Proc. 7th Intern. Conf. on Textures of Materials (ICOTOM 7), Holland 1984 , pp. 839-843
    • Schwarzer, R.1    Weiland, H.2
  • 42
    • 0343392874 scopus 로고
    • Die aufnahme von reflexions-Kikuchi-diagrammen im REM mit einer peltiergekühlten, integrierenden CCD-videokamera
    • Schwarzer, R., 1989. Die Aufnahme von Reflexions-Kikuchi-Diagrammen im REM mit einer peltiergekühlten, integrierenden CCD-Videokamera. BEDO, 22, 279-282.
    • (1989) BEDO , vol.22 , pp. 279-282
    • Schwarzer, R.1
  • 43
    • 0342523264 scopus 로고
    • Crystal texture analysis by means of electron diffraction
    • eds H. J. Bunge and C. Esling, DGM-Verlagsgesellschaft, Oberursel und New York
    • Schwarzer, R. A., 1991. Crystal texture analysis by means of electron diffraction. In Advances and Applications of Quantitative Texture Analysis, eds H. J. Bunge and C. Esling, pp. 51-72. DGM-Verlagsgesellschaft, Oberursel und New York.
    • (1991) Advances and Applications of Quantitative Texture Analysis , pp. 51-72
    • Schwarzer, R.A.1
  • 44
    • 0001770453 scopus 로고
    • The determination of local texture by electron diffraction - a tutorial review
    • Schwarzer, R. A., 1993. The determination of local texture by electron diffraction - a tutorial review. Textures and Microstructures, 20, 7-27.
    • (1993) Textures and Microstructures , vol.20 , pp. 7-27
    • Schwarzer, R.A.1
  • 45
    • 0342523262 scopus 로고
    • Crystal texture analysis of ceramics by electron microscopy
    • Schwarzer, R. A., 1993b. Crystal texture analysis of ceramics by electron microscopy. Ceramika, 42 and Polski Biuletyn Ceramiczny, 4, 59-65.
    • (1993) Ceramika , vol.42
    • Schwarzer, R.A.1
  • 46
    • 0342523263 scopus 로고    scopus 로고
    • Schwarzer, R. A., 1993b. Crystal texture analysis of ceramics by electron microscopy. Ceramika, 42 and Polski Biuletyn Ceramiczny, 4, 59-65.
    • Polski Biuletyn Ceramiczny , vol.4 , pp. 59-65
  • 47
    • 0027610763 scopus 로고
    • The effect of grain orientation on the relaxation of thermomechanical stress and hillock growth in Al-1%Si conductor layers on silicon substrates
    • Schwarzer, R. A. and Gerth, D., 1993. The effect of grain orientation on the relaxation of thermomechanical stress and hillock growth in Al-1%Si conductor layers on silicon substrates. J. Electronic Materials, 22, 607-610.
    • (1993) J. Electronic Materials , vol.22 , pp. 607-610
    • Schwarzer, R.A.1    Gerth, D.2
  • 48
    • 0028666470 scopus 로고
    • A CCD camera system for the acquisition of backscatter Kikuchi patterns on an SEM
    • Schwarzer, R.A., 1994. A CCD camera system for the acquisition of backscatter Kikuchi patterns on an SEM. Materials Science Forum, 157-162, 187-188.
    • (1994) Materials Science Forum , vol.157-162 , pp. 187-188
    • Schwarzer, R.A.1
  • 49
    • 0028666471 scopus 로고
    • Preparation of high-resistance or sensitive samples for grain orientation measurement with electron microscopes
    • Schwarzer, R.A., 1994. Preparation of high-resistance or sensitive samples for grain orientation measurement with electron microscopes. Materials Science Forum, 157-162, 201-206.
    • (1994) Materials Science Forum , vol.157-162 , pp. 201-206
    • Schwarzer, R.A.1
  • 50
    • 0028666469 scopus 로고
    • On-line interpretation of SAD channeling patterns
    • Schwarzer, R.A., Zaefferer, S., 1994. On-line interpretation of SAD channeling patterns. Materials Science Forum, 157-162, 195-200.
    • (1994) Materials Science Forum , vol.157-162 , pp. 195-200
    • Schwarzer, R.A.1    Zaefferer, S.2
  • 51
    • 0006074221 scopus 로고
    • Automated measurement of grain orientations and on-line determination of complete deformation systems with a TEM
    • Schwarzer, R. A., Zaefferer, S., 1995. Automated measurement of grain orientations and on-line determination of complete deformation systems with a TEM. Advances in X-Ray Analysis, 38, 377-381.
    • (1995) Advances in X-ray Analysis , vol.38 , pp. 377-381
    • Schwarzer, R.A.1    Zaefferer, S.2
  • 52
    • 0242500692 scopus 로고
    • The characterization of microtexture by orientation mapping microscopy
    • Schwarzer, R. A. and Kunze, K., 1995. The characterization of microtexture by orientation mapping microscopy. Advances in X-Ray Analysis, 38, 547-550.
    • (1995) Advances in X-ray Analysis , vol.38 , pp. 547-550
    • Schwarzer, R.A.1    Kunze, K.2
  • 53
    • 0009727479 scopus 로고    scopus 로고
    • Crystal orientation mapping by digital beam scan and automated interpretation of backscatter Kikuchi patterns in the SEM
    • X'ian, China
    • Schwarzer, R. A., Springer, F. and Zaefferer, S., 1996. Crystal orientation mapping by digital beam scan and automated interpretation of backscatter Kikuchi patterns in the SEM. Proc. 11th Int. Conf. Textures Materials (ICOTOM 11), X'ian, China, pp. 43-52.
    • (1996) Proc. 11th Int. Conf. Textures Materials (ICOTOM 11) , pp. 43-52
    • Schwarzer, R.A.1    Springer, F.2    Zaefferer, S.3
  • 54
    • 0015627883 scopus 로고
    • Electron back-scattering patterns - a new technique for obtaining crystallographic information in the SEM
    • Venables, J. A. and Harland, C. J., 1973. Electron back-scattering patterns - a new technique for obtaining crystallographic information in the SEM. Phil. Mag., 27, 1193-1200.
    • (1973) Phil. Mag. , vol.27 , pp. 1193-1200
    • Venables, J.A.1    Harland, C.J.2
  • 55
    • 0017493689 scopus 로고
    • Accurate microcrystallography using electron back-scattering patterns
    • Venables, J. A. and Bin-Jaya, R., 1977. Accurate microcrystallography using electron back-scattering patterns. Phil. Mag., 35, 1317-1332.
    • (1977) Phil. Mag. , vol.35 , pp. 1317-1332
    • Venables, J.A.1    Bin-Jaya, R.2
  • 56
    • 0020547405 scopus 로고
    • Observations of plane-matching boundaries by electron channelling patterns
    • Watanabe, T., 1983. Observations of plane-matching boundaries by electron channelling patterns. Phil. Mag. A, 47, 141-146.
    • (1983) Phil. Mag. A , vol.47 , pp. 141-146
    • Watanabe, T.1
  • 57
    • 0342957504 scopus 로고
    • On-line auswertung von Kikuchi-und channelling-diagrammen
    • Weiland, H. and Schwarzer, R., 1985. On-line Auswertung von Kikuchi-und Channelling-Diagrammen. BEDO, 18, 55-60.
    • (1985) BEDO , vol.18 , pp. 55-60
    • Weiland, H.1    Schwarzer, R.2
  • 58
    • 0342523261 scopus 로고
    • On-line texture determination by Kikuchi or channeling patterns
    • ed. H. J. Bunge, DGM-Verlagsgesellschaft, Oberursel and New York
    • Weiland, H. and Schwarzer, R., 1986. On-line texture determination by Kikuchi or channeling patterns. In Experimental Techniques of Texture Analysis, ed. H. J. Bunge, pp. 301-313. DGM-Verlagsgesellschaft, Oberursel and New York.
    • (1986) Experimental Techniques of Texture Analysis , pp. 301-313
    • Weiland, H.1    Schwarzer, R.2
  • 59
    • 0028494533 scopus 로고
    • Microstructure determination and its application to materials science
    • Weiland, H., 1994. Microstructure determination and its application to materials science. Journal of Metals, 46, 37-41.
    • (1994) Journal of Metals , vol.46 , pp. 37-41
    • Weiland, H.1
  • 60
    • 0343828565 scopus 로고
    • The interpretation and application of electron-diffraction "Kikuchi-line" patterns - Part I: The determination of the crystal unit cell, its orientation and the crystal symmetry
    • Wilman, H., 1948. The interpretation and application of electron-diffraction "Kikuchi-line" patterns - Part I: The determination of the crystal unit cell, its orientation and the crystal symmetry. Proc. Phys. Soc. (London), 60, 341-360.
    • (1948) Proc. Phys. Soc. (London) , vol.60 , pp. 341-360
    • Wilman, H.1
  • 61
    • 0005265237 scopus 로고
    • Automated determination of lattice orientation from electron backscattered Kikuchi diffraction patterns
    • Wright, S. I., Zhao, J. and Adams, B. L., 1991. Automated determination of lattice orientation from electron backscattered Kikuchi diffraction patterns. Textures and Microstructures, 13, 123-131.
    • (1991) Textures and Microstructures , vol.13 , pp. 123-131
    • Wright, S.I.1    Zhao, J.2    Adams, B.L.3
  • 62
    • 0345698999 scopus 로고
    • Automated lattice orientation determination from electron backscatter Kikuchi diffraction patterns
    • Wright, S.I. and Adams, B.L., 1991. Automated lattice orientation determination from electron backscatter Kikuchi diffraction patterns. Textures and Microstructures, 14-18, 273-278.
    • (1991) Textures and Microstructures , vol.14-18 , pp. 273-278
    • Wright, S.I.1    Adams, B.L.2
  • 63
    • 0000849871 scopus 로고
    • Automated measurement of single grain orientations in the TEM
    • Zaefferer, S. and Schwarzer, R. A., 1994. Automated measurement of single grain orientations in the TEM. Z. Metallkunde, 85, 585-591.
    • (1994) Z. Metallkunde , vol.85 , pp. 585-591
    • Zaefferer, S.1    Schwarzer, R.A.2
  • 64
    • 0028666480 scopus 로고
    • On-line determination of complete deformation systems for cubic and hexagonal crystals in the TEM
    • Zaefferer, S. and Schwarzer, R.A., 1994. On-line determination of complete deformation systems for cubic and hexagonal crystals in the TEM. Materials Science Forum, 157-162, 241-246.
    • (1994) Materials Science Forum , vol.157-162 , pp. 241-246
    • Zaefferer, S.1    Schwarzer, R.A.2
  • 65
    • 0028666481 scopus 로고
    • On-line iinterpretation of spot and Kikuchi patterns
    • Zaefferer, S. and Schwarzer, R.A., 1994. On-line iinterpretation of spot and Kikuchi patterns. Materials Science Forum, 157-162, 247-250.
    • (1994) Materials Science Forum , vol.157-162 , pp. 247-250
    • Zaefferer, S.1    Schwarzer, R.A.2


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