Dual-column (FIB-SEM) wafer applications

Micron

Volumn 30, Issue 3, 1999, Pages 221-226

  Krueger, Robert ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

Defect characterization; Dual column; Focused ion beam; Metal deposition; Scanning electron microscope; TEM sample preparation

Indexed keywords

EID: 0032971708     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(98)00044-4     Document Type: Short Survey

References (11)

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