Organosilicate Spin-On Glasses II. Effect of Physical Modification on Mechanical Properties

Journal of the Electrochemical Society

Volumn 151, Issue 3, 2004, Pages

  Toivola, Yvete ^a   Kim, Suhan ^b   Cook, Robert F ^a   Char, Kookheon ^b   Lee, Jin Kyu ^b   Yoon, Do Y ^b   Rhee, Hee Woo ^c   Kim, Sang Youl ^d   Jin, Moon Young ^e  

^a UNIVERSITY OF MINNESOTA   (United States)

^b Seoul National University   (South Korea)

^c Sogang University   (South Korea)

^d Korea Research Institute of Chemical Technology   (South Korea)

^e Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COPOLYMERS; ELLIPSOMETRY; HARDNESS; INDENTATION; INFRARED SPECTROSCOPY; OPTIMIZATION; PERMITTIVITY; POROSITY; SCANNING ELECTRON MICROSCOPY; SILICATES; SYNTHESIS (CHEMICAL);

DEPTH-SENSING INDENTATION; SPIN-ON GLASSES;

GLASS;

EID: 1842530089     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1643073     Document Type: Article

References (35)

1. International Technology Roadmap for Semiconductors, Semiconductor Industry Association, San Jose, CA (2002).
2. I. H. Golden, C. J. Hawker, and P. S. Ho, Semicond. Int., 24, 79 (2000).
3. C. Jin, J. D. Luttmer, D. M. Smith, and T. A. Ramos, MRS Bull., 22, 39 (1997).
4. T. G. Tsai, A. T. Cho, C. M. Yang, F. M. Pan, and K. J. Chao, J. Electrochem. Soc., 149, F116 (2002).
5. S. Baskaran, J. Liu, K. Domansky, N. Kohler, X. Li, C. Coyle, G. E. Fryxell, S. Thevuthasan, and R. E. Williford, Adv. Mater. (Weinheim, Ger.), 12, 291 (2000).
6. J.-H. Kim, S.-B. Jung, H.-H. Park, and S.-H. Hyun, Thin Solid Films, 377-378, 467 (2000).
7. B. Krause, G.-H. Koops, N. F. A. van der Vegt, M. Wessling, M. Wübbenhorst, and J. van Turnhout, Adv. Mater. (Weinheim, Ger.), 14, 1041 (2002).
8. Y. F. Chow, T. H. Foo, L. Shen, J. S. Pan, A. Y. Du, Z. X. Xing, Y. J. Yuan, C. Y. Li, R. Kumar, and P. D. Foo, Mater. Res. Soc. Symp. Proc., 716, B12.2.1 (2002).
9. J. L. Hedrick, T. P. Russell, M. Sanchez, R. DiPietro, S. Swanson, D. Mecerreyes, and R. Jerome, Macromolecules, 29, 3642 (1996).
10. C. V. Nguyen, K. R. Carter, C. J. Hawker, J. L. Hedrick, R. L. Jaffe, R. D. Miller, J. F. Remenar, H. W. Rhee, P. M. Rice, M. F. Toney, M. Trollsas, and D. Y. Yoon, Chem. Mater., 11, 3080 (1999).
11. Q. R. Huang, W. Volksen, E. Huang, M. Toney, C. W. Frank, and R. D. Miller, Chem. Mater., 14, 3676 (2002).
12. S. Yang, P. A. Mirau, C.-S. Pai, O. Nalamasu, E. Reichmanis, J. C. Pai, Y. S. Obeng, J. Seputro, E. K. Lin, H.-J. Lee, J. Sun, and D. W. Gidley, Chem. Mater., 14, 369 (2002).
13. A. M. Padovani, L. Rhodes, S. A. B. Allen, and P. A. Kohi, J. Electrochem. Soc., 149, F161 (2002).
14. A. M. Padovani, L. Riester, L. Rhodes, S. A. B. Allen, and P. A. Kohl, J. Electrochem. Soc., 149, F171 (2002).
15. B. Zhong, H. Meynen, F. Iocopi, K. Weidner, S. Mailhouitre, E. Moyer, C. Bargeron, P. Schalk, A. Peck, M. Van Hove, and K. Maex, Mater. Res. Soc. Symp. Proc., 716, B12.4.1 (2002).
16. H.-J. Lee, E. K. Lin, W. Wang, W.-L. Wu, W. Chen, and T. A. Deis, Mater. Res. Soc. Symp. Proc., 714, L7.11.1 (2001).
17. C. J. Hawker, J. L. Hedrick, R. D. Miller, and W. Volksen, MAS Bull., 25, 54 (2000).
18. M. E. Thomas, N. Iwamoto, D. Smith, and S. Wallace, Semicond. Int., 25, 105 (2002).
19. G. W. Ray, Mater. Res. Soc. Symp. Proc., 511, 199 (1998).
20. R. Bajaj, A. Zutshi, R. Surana, M. Naik, and T. Pan, MRS Bull., 27, 776 (2002).
21. W.-C. Chen and C.-T. Yen, J. Vac. Sci. Technol. B, 18, 201 (2000).
22. W.-C. Chen, S.-C. Lin, B.-T. Dai, and M.-S. Tsai, J. Electrochem. Soc., 146, 3004 (1999).
23. V. P. Atluri, R. V. Mahajan, P. R. Patel, D. Mallik, J. Tang, V. S. Wakharkar, O. M. Chrysler, C.-P. Chiu, G. N. Choksi, and R. S. Viswanath, MRS Bull., 28, 21 (2003).
24. S. M. Kim, D. Y. Yoon, C. V. Nguyen, J. Han, and R. L. Jaffe, Mater. Res. Soc. Symp. Proc., 511, 39 (1998).
25. R. F. Cook, Mater. Res. Soc. Symp. Proc., 576, 301 (1999).
26. S. Kim, Y. Toivola, R. F. Cook, K. Char, and D. Y. Yoon, J. Electrochem. Soc., 151, F37 (2003).
27. J.-K. Lee, K. Char, H. W. Rhee, H.-W. Ro, D. Y. Yoo, and D. Y. Yoon, Polymer, 42, 9085 (2001).
28. Y. Toivola, J. Thurn, and R. F. Cook, J. Electrochem. Soc., 149, F9 (2002).
29. W. C. Oliver and G. M. Pharr, J. Mater. Res., 7, 1564 (1992).
30. C. Y. Wang, Z. X. Shen, and J. Z. Zheng, Appl. Spectrosc., 54, 209 (2000).
31. C. Y. Wang, Z. X. Shen, and J. Z. Zheng, Appl. Spectrosc., 55, 1347 (2001).
32. G. Socrates, Infrared and Raman Group Characteristic Frequencies: Tables and Charts, John Wiley & Sons, Inc., New York (2001).
33. R. F. Cook and E. G. Liniger, J. Electrochem. Soc., 146, 4439 (1999).
34. D. J. Morris and R. F. Cook, Mater. Res. Soc. Symp. Proc., 766, E9.3.1 (2003).
35. L. J. Gibson and M. F. Ashby, Cellular Solids: Structure and Properties, 2nd ed., p. 186. Cambridge University Press, Cambridge, MA (1997).