Stress-Corrosion Cracking of Low-Dielectric-Constant Spin-On-Glass Thin Films

Journal of the Electrochemical Society

Volumn 146, Issue 12, 1999, Pages 4439-4448

  Cook, Robert F ^a,b   Liniger, Eric G ^b  

^a University of Minnesota   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000434759     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1392656     Document Type: Article

References (15)

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