Indentation fracture toughness measurements of low dielectric constant materials

Materials Research Society Symposium - Proceedings

Volumn 766, Issue , 2003, Pages 165-170

  Morris, Dylan J ^a   Cook, Robert F ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACKS; FRACTURE TOUGHNESS; INDENTATION; PERMITTIVITY; POISSON RATIO; STRESSES;

FILM STRESS; FILM THICKNESS; TOUGHNESS MEASUREMENTS;

DIELECTRIC MATERIALS;

EID: 0347569414     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-766-e9.3     Document Type: Conference Paper

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